中Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions.
Microfabrication Fundamental Processes
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August 2025
作业
9 项作业
授课语言：英语（English）
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本课程是 Introduction to Semiconductor and MEMS Fabrication 专项课程 专项课程的一部分
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该课程共有3个模块
In this module we cover thin film deposition using both physical and chemical methods. We briefly discuss some of the important features of thin films that determine the materials and deposition processes selected. A general introduction is provided for some of the most commonly used physical and chemical deposition methods.
涵盖的内容
3个视频2篇阅读材料3个作业
In this module we discuss lithography techniques and technologies, which are one of the foundational process steps to all microfabrication technologies.
涵盖的内容
3个视频2篇阅读材料3个作业
This module presents an introduction to the fundamental micromachining technology of etching. This is a subtractive process where material is removed to create or transfer pattern to thin film layers.
涵盖的内容
3个视频5篇阅读材料3个作业
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